Upgraded from conventional laboratory fume hoods, intelligent wet process workstations are engineered for highly corrosive and high-risk processes including semiconductor wet processing, acid etching and cleaning. Built around modular construction, full-range safety interlocks, precise parameter control and intelligent voice-enabled operation & maintenance, the equipment fully complies with SEMI standards, cleanroom specifications and actual production requirements. It sets new benchmarks for semiconductor wet-process ventilation equipment via quantifiable performance indicators.
I. Basic Structural Configuration
1. Zonal Layout
· Top FFU clean air supply (Optional): Vertical laminar airflow with face velocity of 0.35–0.55 m/s. Forms a positive-pressure air curtain to isolate external contaminants and meets Class 100 / Class 1000 cleanroom requirements.
· Central operation zone (Core Section): Sash-linked variable air volume control; airflow uniformity ≥90% without turbulence or dead zones. The sash adopts safety tempered glass equipped with position interlock and height alarm functions.
· Lower intelligent reagent cabinet + waste liquid collection: Corrosion-resistant sealed cabinet integrated with temperature & humidity monitoring and nitrogen purging for moisture-proof and anti-oxidation protection. Fitted with spill containment tray, waste liquid diversion channel and secondary recovery tank to prevent chemical leakage spread.
2. Airflow Organization
Recommended airflow scheme: top supply & bottom exhaust counter-flow
l Face velocity: 0.3–0.5 m/s, maximum deviation ≤±2%
l Capture efficiency for hazardous gas >99.999%
l Micro-positive pressure inert gas protection for reagent cabinets, suitable for easily oxidized and reactive chemicals
3. Standard Water, Gas & Power Utilities
l Water & air gun (Standard): PP/PFA anti-corrosion material, working pressure 0.4–0.6 MPa, supporting DI water rinsing and nitrogen purging with quick-disconnect leak-free fittings.
l Safety power socket (Standard): 10 A explosion-proof socket with acid mist resistance, splash-proof and overload protection.
l Water tap + sink (Optional): Integrated PP/PVDF molding, resistant to strong corrosives such as HF; equipped with overflow prevention and backflow prevention.
II. Safety System Configuration
1. Multi-stage Safety Interlocks (Mandatory)
l Infrared door interlock: Fan responds within 1 second upon door opening, ramping airflow to safe threshold.
l Sash height interlock: Triggers enhanced exhaust when over-limit; audible & visual alarm if left open for excessive duration.
l Emergency stop: One-button emergency shutdown cuts off fan and closes air dampers to prevent cross-contamination.
l Fire damper linkage: Compliant with laboratory fire codes; automatic damper closure upon fire detection.
2. Leakage & Corrosion Protection (Mandatory)
l Cabinet and worktop constructed from PP/SUS316L for superior resistance against corrosive media.
l Dual protection: worktop flow guide + bottom spill containment tray.
l Waste liquid leakage sensor triggers high-brightness audible & visual alarm once leakage occurs.
3. Ambient & Gas Monitoring (Optional / Mandatory on Demand)
l On-line monitoring: HF / HCl / acetone / flammable gas detection with accuracy ±0.1%; system switches to maximum airflow and generates alarm upon over-limit.
l Reagent cabinet temperature & humidity monitoring: accuracy ±0.1°C / ±1% RH, sampling frequency once per second.
4. Premium Safety Options
l Automatic fire suppression: temperature / smoke / flame detection, response time <3 s; automatically cuts airflow, closes valves and activates fire extinguishing.
l Nitrogen inertization: micro-positive pressure protection to mitigate oxidation and chemical reaction risks.
III. Intelligent Control Configuration
1. Intelligent Voice Control (Standard)
l Response latency <0.5 s; recognition rate ≥99.2% under ambient noise ≤67 dB.
l Voice command support: fan start/stop, airflow adjustment, sash lifting/lowering, lighting switch, nitrogen purging, etc.
l Synchronized voice broadcast for alarms; customizable command library supported.
2. Intelligent Early Warning & Centralized Joint Control (Optional)
l Dual-model filter service life prediction based on pressure differential and operating time; 72-hour advance maintenance alert.
l Communication interfaces: RS485 / Ethernet / MQTT for centralized monitoring of multiple units.
l Automatic storage of operational data, historical trend curves and Excel export to satisfy audit traceability requirements.
l Variable-frequency fan adaptive speed regulation, delivering ≥30% energy saving.
IV. Electrical & Compliance Specifications
l Power supply: AC220 V / 50 Hz
l Fan specification: 110 W variable frequency, low noise and energy efficient
l Noise level: ≤67 dB(A)
l Earthing resistance: <10 Ω for anti-static protection
l Compliance: meets SEMI standards, cleanroom specifications and factory EHS audit requirements
