Hualinkena semiconductor wet process laboratory covers an area of 1000 square meters, including 800 square meters of 1000 grade clean room and 200 square meters of 100 grade clean room. Purchase laboratory platform necessary experiment and testing equipment and consumables, including KOH corrosion equipment, RCA cleaning equipment, organic cleaning equipment, oxidation cleaning equipment, metal corrosion equipment, implant surface treatment equipment, single cavity drying equipment, double cavity drying equipment, infrared welding equipment, scanning microscope, uniform instrument, super net workbench, electronic balance, etc. And equipped with the corresponding research and development of technical personnel, to build a pan-semiconductor wet process experiment platform.
LAB PROJECT
Thermal simulation simulation platform
Fluid dynamics of artifacts in wet chemical reaction and heat change by simulation software
Wet process verification
Pan-semiconductor wet process verification, including wet etching, acid-base corrosion, electrochemical plating, cleaning, etc.