Oxygen Control Mechanism of Oxygen-Free Vacuum Surface Treatment Station

Ø Airflow Organization: Vertical downward nitrogen supply via multi-stage dense-hole laminar plates at the top, with bottom exhaust forming unidirectional airflow to rapidly displace oxygen-containing air.

Ø Oxygen Control Logic: The initial nitrogen charging volume is calculated based on chamber volume. Once oxygen content reaches the target threshold, the system automatically switches to cyclic nitrogen charging mode with precise flow regulation through proportional valves.

Ø Anti-Contamination Protection: A continuous nitrogen flow of 4 L/min is maintained at the tank opening after process completion to form an air curtain blocking external contaminants.

Ø Environmental Monitoring: Real-time temperature and humidity monitoring within the working zone effectively prevents condensation and ensures surface cleanliness of components.

Ø Intelligent Early Warning: Real-time O₂ concentration detection. Voice notification upon reaching target oxygen level; linked alarms triggered for abnormal conditions to guarantee process safety.

Additional Equipment Configurations (Beyond Oxygen-Free Environment)

1. Dual-Tank Vacuum Process System Equipped with a vacuum etching tank and an ultra-pure water rinsing tank as standard. The etching tank supports high vacuum up to -0.1 MPa and heating temperature control. The rinsing tank is optionally fitted with a 40 kHz ultrasonic unit, enabling integrated vacuum etching, spray overflow and ultra-clean rinsing processes.

2. Cleanliness & Safety Protection Configuration Glovebox-style sealed operation integrated with an auto air shower and nitrogen-purged load/unload transfer chamber. The whole unit adopts corrosion-resistant materials including PP, PVDF and PTFE. It is furnished with voice-activated leakage alarm, tri-color status indicator light, bottom buffer tank and water-air gun, delivering multi-layer safety guarantees for dust-free operation, leakage prevention and corrosion resistance.

3. AI Intelligent Interaction System Supports contact-free AI voice control suitable for cleanrooms; operators can adjust nitrogen supply, ventilation and lighting via voice commands. Functions include safety interlock, real-time differential pressure monitoring, data logging and remote joint control, with automatic voice alert for malfunctions.

4. Modular Structural Design Compact frame with standard dimensions and modular workstation layout. The etching tank, rinsing tank and loading/unloading modules can be flexibly combined to accommodate process switching and installation for lab-scale trials, pilot production and R&D lines.

5. Wide Application Compatibility Applicable to semiconductors, third-generation semiconductors, optical glass, medical implants, Mini/Micro LED, new energy, MEMS, and new material R&D for research institutes. Supports general wet processes such as wet etching, cleaning and surface modification.

In the field of high-precision oxygen-free vacuum surface treatment equipment, Hualin Kena continuously optimizes solutions targeting industry pain points. The self-developed oxygen-free vacuum surface treatment workstation integrates ≤10 ppm oxygen control, vacuum etching and AI intelligence technologies. It provides stable and reliable wet process support for lab trials, pilot lines and R&D production lines, helping industries including semiconductors, optics, medical devices and new energy improve process stability and product yield.