To provide cleaning fluid required for the process, including raw material conveying of abrasive liquid, mixing dilution, circulation supply function and running test
Control mode:manual control mode, automatic control mode
Chemical classification: alkaline chemicals, acidic chemicals, organic solvent chemicals
Supply of high purity chemicals
·To clean impurities and particles from chips
·To etch chip patterns
·To develop chip patterns
·As chemical vapor deposition prereactants
·For grinding chips
·Clean parts of process equipment
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