1. Introduction

In the semiconductor and chemical industries, high-efficiency, reliable, and specially qualified fluid handling equipment is critical. Fluoropolymer diaphragm pumps have emerged as the ideal choice for fluid transfer in these sectors, thanks to their unique properties such as corrosion resistance, high-temperature tolerance, and excellent sealing performance. With the increasing precision of semiconductor manufacturing processes and the growing demands for safety and efficiency in the chemical industry, a deep understanding of the operation and maintenance of fluoropolymer diaphragm pumps has become increasingly significant.

2. Structure and Material Selection of Diaphragm Pumps

2.1 Structural Overview

Fluoropolymer diaphragm pumps primarily consist of three components: the power end, hydraulic end, and auxiliary systems. The power end provides stable power to drive the reciprocating motion of the diaphragm. The hydraulic end directly handles fluid transfer, housing key components such as the diaphragm and valves. Auxiliary systems, including pneumatic and electrical circuits, work synergistically to ensure the overall normal operation of the pump.

2.2 Material Selection Specificity

In the semiconductor and chemical industries, where media often exhibit strong corrosiveness, high purity, or particulate content, the advantages of fluoropolymer materials are prominent. Polytetrafluoroethylene (PTFE) and perfluoroalkoxy alkane (PFA) are widely used in critical components of fluoropolymer diaphragm pumps. These materials exhibit exceptional corrosion resistance, effectively withstanding attacks from strong acids and alkalis in chemical applications. They also maintain stability under high temperatures, making them suitable for high-temperature environments in semiconductor manufacturing. Additionally, the smooth surface of fluoropolymers minimizes adsorption of impurities—a critical feature for high-purity media transfer in semiconductors, as it prevents contamination of precision processes like chip fabrication.

3. Operational Management

3.1 Operation in Cleanroom Environments (Special Requirements for the Semiconductor Industry)

In cleanroom environments of the semiconductor industry, operating diaphragm pumps requires particular attention to preventing particulate contamination. First, the sealing system must be maintained in optimal condition. High-quality sealing materials should be used, and seals should be inspected and replaced regularly to prevent external particles from entering the pump and contaminating the transferred media. Second, efficient filtration devices should be installed in the air intake and exhaust systems of the pump. These filters require regular cleaning or replacement to ensure their effectiveness, avoiding particle ingress or egress with airflow that could contaminate the media.

3.2 Parameter Monitoring

During operation, close monitoring of key parameters is essential. Pressure is a critical indicator—stable pressure ensures consistent media transfer. Abnormal pressure fluctuations (either increase or decrease) may signal issues such as diaphragm damage, valve failure, or pipeline blockage. Flow rate monitoring is equally important, as instability can compromise product quality in chemical production or process precision in semiconductor manufacturing. Temperature is another vital parameter: in chemical applications, changes in media temperature may alter its chemical properties, while heat generation during pump operation must be controlled to avoid overheating and equipment damage. Additionally, vibration and abnormal noise serve as early indicators of potential faults; installing vibration sensors and auditory monitoring devices enables timely detection of such issues.

4. Maintenance Strategies

4.1 Anti-Corrosion Treatment

Given frequent contact with corrosive media, anti-corrosion treatment is a focal point of maintenance. During routine checks, external surfaces of the pump should be inspected for signs of corrosion. For internal protection, beyond selecting corrosion-resistant fluoropolymers, specialized anti-corrosive coatings or cleaning agents may be applied periodically based on media characteristics. For example, in chemical plants handling strongly acidic media, specialized acidic cleaning agents can be used to remove residual corrosive substances, followed by application of anti-corrosive coatings on critical components to enhance acid resistance.

4.2 Regular Inspections

Routine inspections of all pump components are necessary to ensure reliable operation. For diaphragms, checks should focus on wear, cracks, or aging—degradation of diaphragms directly reduces flow rate and pressure, necessitating timely replacement. Valves require inspection for sealing performance and operational flexibility; faulty valves may cause media leakage or unstable flow. Additionally, mechanical components in the power end (e.g., pistons, crankshafts) should be checked for proper lubrication, wear, or loosening.

4.3 Spare Parts Management

Effective spare parts management ensures rapid repair in case of failures. A stock of common spare parts (e.g., diaphragms, valves, seals) should be maintained, prioritizing original manufacturer parts to guarantee compatibility and performance. A usage log for spare parts should also be established to track service life and replacement frequency, facilitating proactive procurement planning.

5. Safety Specifications (Explosion-Proof Measures)

1. 1.

   In the chemical industry, diaphragm pumps often operate in explosive environments. Thus, explosion-proof motors or anti-static components are required. Explosion-proof motors prevent ignition from electrical sparks, while anti-static components mitigate risks from static electricity accumulation.

   
   

2. 2.

   During operation and maintenance, strict adherence to safety protocols is mandatory. Before any maintenance, the pump must be fully stopped, with power and gas supplies cut off. For media with explosion risks, protective measures (e.g., wearing gas masks, using explosion-proof tools) must be implemented.

   
   

6. Case Studies of Fault Handling

6.1 Case 1: Diaphragm Rupture

In a chemical plant, a fluoropolymer diaphragm pump suddenly experienced reduced flow while transferring strongly acidic media. Inspection revealed diaphragm rupture, caused by long-term corrosion from the acidic medium and diaphragm aging. The solution involved replacing the diaphragm, applying specialized anti-corrosive cleaning agents to the pump interior, and coating critical areas with anti-corrosive materials. Subsequent operations included enhanced monitoring of media corrosivity and regular diaphragm replacement, ensuring stable pump performance.

6.2 Case 2: Valve Failure

At a semiconductor manufacturing facility, a diaphragm pump used for high-purity chemical transfer exhibited unstable flow. Investigation identified valve failure due to degraded sealing performance. Repairs included replacing the valve, inspecting and cleaning the entire pneumatic and hydraulic systems to remove residual impurities, and tightening valve inspection frequency to prevent recurrence.

Through in-depth analysis of the operation and maintenance of fluoropolymer diaphragm pumps in the semiconductor and chemical industries, enterprises can extend pump service life, reduce downtime, ensure production efficiency and product quality, and guarantee safe operation under special environmental conditions.