On March 20, the second Hualinkena semiconductor wet Training meeting was successfully held in Hualinkena (Jiangsu) Semiconductor Equipment Co., LTD. This training session with the theme of "voice together platform, friends together to build data" for chip design, wafer manufacturing, packaging and testing, materials and equipment and downstream application industry chain groups. The training will further focus on the new developments, new trends, new technologies and innovative projects of the pan-semiconductor wet process industry, and deeply discuss the development mode and industry development trend of the wet process.
This training meeting for the actual users of wet process equipment, mainly led by the wet process industry leader Hualin Cona, brought together the wet process & equipment, wet process chemical knowledge, water treatment knowledge, ultrasonic/megasound cleaning knowledge, professional metering instrument application knowledge and other excellent courses in the industrial chain. The speakers of each course are from the international first-class or the top domestic supply chain, which all represent the leading level of the current industry.
The course began with the "Analysis of wet equipment and process" brought by Gao Yan, project director of Hualin Kona, which introduced the influence of wet cleaning in the semiconductor field. With each generation of the process, the cleaning step increases by about 15%. With the increase of semiconductor device integration and chip complexity, the sensitivity of chip to impurities is greatly improved. Under the premise of continuous advancement of process nodes, in order to reduce the influence of impurities and improve the yield, it is necessary to continue to increase the cleaning steps.
Affected by the current international epidemic situation, and under the vigorous development of the domestic semiconductor industry in the country, the nationalization rate of the local cleaning equipment market is about 20%, and localization is expected to further accelerate. Compared with the dominant position of foreign Japanese companies in the cleaning machine industry, domestic wet process equipment manufacturers represented by Hualincona have a certain competitiveness in the field of trough.
After analyzing the market background of wet process equipment, Director Gao introduced the role and effect analysis of various SC1, SC2, HF/BOE and other chemicals in the cleaning process from the development of general RCA cleaning process knowledge. From the professional point of view, the influence and effect of wet cleaning equipment on Clean, Etch, PhotoreSist Removal & Development Process are described and analyzed.
In addition, the professional lecturers in various fields of Hualin Cona special contract also shared the knowledge of pure water machine related to wet process, chemicals used in wet process, ultrasonic/megasonic cleaning process principle and its application in wet process equipment, the application of precision instruments in wet process equipment, waste liquid waste gas treatment programs and other professional fields. The whole meeting was full of dry goods and gained a lot.
In combination with the theoretical teaching, in the Walinkona training Hall, the professional manufacturers of the supply chain also provide physical objects for the students to observe the equipment and parts up close. At the site, professional engineers explained the principles, points of attention and maintenance knowledge of various core equipment such as automatic acid corrosion machine, chemical thermostat, Marangoni dryer and intelligent liquid dispenser, creating a high-level, high openness and high freedom training exchange platform.
The thousand-grade wet process laboratory built by Warincona is used to provide wet process experimental verification and core function module demonstration services. In this training meeting for the first time open to the public, also ushered in the first batch of users, Zhang teacher from Tsinghua University in the wet laboratory to carry out the back corrosion experiment.
Based on the basis of the first semiconductor wet training meeting, this training meeting, the organizer Hualin Cona further enhance the specialization, new, high-end, enhance the brand image and influence of the conference, established the "high standard, professional" requirements, promote the growth of industry segments, make up for the pain points and blind spots of both supply and demand, and fully demonstrate the advantages of technology gathering. Enhanced mutual assistance and cooperation between enterprises.
Warincona Semiconductor wet training conference will be held once every six months, for regular holding. As the earliest brand to enter the field of wet equipment in China, the organizer Hualincona is about to complete the process of transformation from equipment manufacturers to technology-oriented service providers, and strive to contribute its own strength to the talent training and technological evolution of China's semiconductor industry.