When procuring wet processing equipment, in addition to focusing on core indicators, the importance of compatibility cannot be overlooked.

Compatibility directly relates to whether the equipment can properly adapt to production and deliver its intended performance, avoiding subsequent adaptation challenges. Otherwise, it will not only lead to idle equipment and waste but may also delay production schedules and increase additional costs.

First is process compatibility. The equipment must align with existing production processes—for example, its processing workflows and parameter settings should be consistent with current process standards, allowing it to be deployed without significant process adjustments. Incompatibility that prevents use must be avoided.

Second is production line integration compatibility. The equipment should seamlessly integrate into the existing production line, including interface adaptation and signal transmission, to connect smoothly with upstream and downstream devices without disrupting the overall production rhythm.

Wafer size and thickness compatibility is also critical. The equipment must accommodate commonly used wafer specifications in production—whether standard sizes or specific ones—and have the necessary adaptability to avoid restricting production needs due to mismatched dimensions.

Chemical liquid compatibility is equally important. The equipment must withstand various chemical liquids used in production, especially highly corrosive reagents. Its materials and sealing performance must meet tolerance standards to prevent damage or product quality issues.

Finally, there is software and data compatibility. The equipment’s control system and data transmission functions must be compatible with existing software systems—e.g., data formats and communication protocols should align with current systems. This ensures smooth data flow, unified operations, and easier staff management, while reducing subsequent training and debugging costs.