Email:xu@hlkncse.com
Tel:13358064333
Fluid Control Division​
Look forward to meeting you in Hall E4,E4155

SEMICON China 2023 will be held in Shanghai as scheduled.Hualinkena will bring you leading wet process solutions and We will have one-to-one exchanges with upstream and downstream enterprises to find the main reasons for the development difficulties and propose reasonable and feasible solutions.

 

Specific Information

Time: June 29-July 1

Place:Shanghai New International Expo Centre (SNIEC)

Booth:Hall E4,E4155

 

Wet clean & Wet etch

 

Wet Clean

Wafer Clean,Glass Clean,Film Frame Clean,Wafer Edge Clean,Mask Clean,Post-CMP Clean......

 

Wet Etch

Si Etch,SiGe Etch,GaAs Etch,Glass Etch,Al Etch,Cu Foil Etch,Inp Etch,TGV Etch......

 

Fiuid Management Systems

1.PFA Tube

 

·Size:1/8"-1-1/2"

·TypesStraight Union,Tee Union,Elbow Union

 

2.PFA Fittings

 

·Prevent most dirtying and scaling

·Excellent weather-resistant properties

·Reduce incidence of retained particles or chemicals

·Excellent corrosion resistance

 

3.Diaphragm Valve

 

·Connection size: 1/2 ", 3/4 ", 1 "

·High purity,cleanroom manufacturing

·Excellent corrosion resistance

·Reduced costs thanks to long service life

 

4.Bellows Pump

 

·Type:CSE30、CSE60、CSE120

·Specially used in semiconductor industry

·100% Metal-Free

·Easy to install and service

·Process-safe PTFE and PFA flow paths

·Cleanroom assembly, testing, and packaging

 

5.PFA Heating Elements

 

·The conductor is imported single strand high strength nickel-chromium alloy wire

·Coat in PFA materials

·The life is about 30% longer than other products

 

6.In-line Heater

 

·Ultrapure design with PFA wetted surfaces

·Excellent corrosion resistance

·Low surface power design to ensure product life

·Enhanced cleanliness and reduce potential for leaks

 

7.Fliter

 

·Ultra-high velocity

·Longer working life(+15%)

·Excellent temperature tolerance

·Excellent corrosion resistance

·Perfluorinated structure

·Minimize metal precipitates

·100% integrity test before delivery