One of the most important factors in the semiconductor manufacturing process is purity. The entire production line and even the final product depend on the ability to maintain absolute purity throughout the process. In this process, there is a kind of component pollution source, which will cause serious harm to the cleanliness of the whole system, and this kind of component involves precision polishing, grinding, etching, cleaning and other processes. It is the ultra-clean fluid control products/, (pipe, pump, valve, filter element, connector, heater, etc.).

The equipment related to the wet process includes chemical system, ultra-pure water system and process equipment. These equipment require the pump to provide the rated delivery pressure for the liquid medium, and the control loop composed of valve, flow sensor, pipeline and joint to realize the mixing of the process medium, and the high temperature process should be supplemented by heater and heat exchanger to control the temperature of the medium. The media contacted by these components are often sulfuric acid, nitric acid, hydrochloric acid and other corrosive chemicals, so it is necessary to choose high purity and corrosion-resistant fluorine plastic products.

So, what are the fluorine and plastic products commonly used in the semiconductor industry?

PFA tube / fittings, PTFE tube / fittings, FEP tube, PVDF socket welded joint, PFA diaphragm valve, PTFF check valve, PVDF fast exhaust valve, PTFE pump, PTFE, PVDF filter, PFA filter, PCTFE rod PTFE plate, PFA rod, and customized products, etc.

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