HUALIN KENA CDS/SDS Equipment Fortifies the "Lifeline" of Semiconductor Manufacturing
As advanced semiconductor processes continue to break through to the nanoscale, wet etching and cleaning—core steps in chip manufacturing—impose extremely stringent requirements on the purity, precision, stability, and safety of chemical supply. As one of China’s earliest providers of total solutions for wet process technology, HUALIN KENA (CSE), drawing on 30 years of industry expertise and focusing on industry pain points, has launched the CSE‑CDS/SDS series of Central Chemical Dispense Systems / Slurry Delivery Systems. Breaking overseas technological monopolies with domestically produced high‑end equipment, it builds a safe, efficient, and precise "lifeline" for chemical delivery in the broad semiconductor sector, including integrated circuits, LEDs, photovoltaics, and MEMS.
HUALIN KENA CDS/SDS equipment is an intelligent chemical supply solution integrating high‑purity materials, precision control, full‑dimensional safety, and digital operation and maintenance. Its core parameters fully meet international standards. It enables 24‑hour uninterrupted, pollution‑free, and high‑precision chemical delivery, and offers higher cost‑performance and better services thanks to its domestic advantages. It is the optimal choice for the broad semiconductor industry to improve yield, reduce costs, and ensure safety.
Technical Advantages
1. High‑purity material structure with fully enclosed design
The structure adopts a stainless steel SUS square tube frame (40×40×3T), externally covered with 10T‑thick acid‑ and alkali‑resistant polypropylene (PP) plates, antistatic casings (single cabinet load capacity ≥500kg), and an integrated leak‑proof tray and leak Sensor detection module at the bottom.
2. Precision control system: digital closed‑loop for ppm‑level dispensing accuracy
The CSE‑CDS/SDS system is equipped with an intelligent control unit consisting of a PLC and a 10‑inch Proface industrial touch screen, integrating multi‑dimensional sensor monitoring and closed‑loop algorithms to realize real‑time regulation of all dispensing parameters.
3. Multi‑level safety protection network
Targeting the characteristics of high‑risk chemicals such as strong acids, strong alkalis, and organic solvents, CSE‑CDS/SDS has built a multi‑level safety protection network. All safety indicators comply with GB 50781‑2012 Code for Engineering of Chemical Systems in Electronic Factories, including leak detection, pressure detection, anti‑corrosion protection, and alarm systems.
4. Empowering advanced processes with remarkable cost reduction and efficiency improvement
24‑hour continuous operation uptime ≥99.95%, meeting the uninterrupted production needs of fabs.
Industrial Value
1. Yield improvement: Stable dispensing precision and zero‑pollution delivery effectively reduce wafer impurity contamination, uneven etching, and other issues, helping boost advanced process yields by more than 5%.
2. Cost reduction: Equipment purchase price is 40% lower than imported brands, and full life‑cycle cost is reduced by more than 50%. Conventional models are in stock with a much shorter delivery time than the 4–8 week cycle of imported equipment, greatly easing enterprises’ capital and production capacity pressure.
3.Safety enhancement: A local technical team provides 7×24‑hour responsive service with 100% spare parts coverage. The customized development cycle is shortened from 12 weeks to 3 weeks, completely solving the pain points of lagging after‑sales service and difficult technical adaptation of overseas brands.
Application Scenarios: Full Coverage for Diverse Needs
HUALIN KENA CDS/SDS equipment is widely used in:
Integrated circuit manufacturing: Centralized chemical supply for wet etching, cleaning, development, and other processes in 8/12‑inch wafer fabs;
Optoelectronics and power devices: High‑purity chemical delivery for LEDs, MEMS, and discrete devices;
Photovoltaics and advanced packaging: Precise liquid preparation and supply for solar cells and wafer bumping processes;
Electronic specialty chemicals: Production, storage, and delivery of high‑purity chemicals.
Implementation: Benchmark Cases Verify Strength
At present, HUALIN KENA CDS/SDS equipment has been successfully applied in the production lines of many leading domestic semiconductor and photovoltaic enterprises, with hundreds of units delivered and over 100,000 hours of operation without major failures. Taking a 12‑inch wafer fab as an example, after introducing the CDS system, chemical dispensing precision is stably controlled at ±1%, and production line downtime is reduced by 60%, making it a benchmark case for domestic high‑end dispensing equipment.
Future Direction: Continuous Innovation Leading Independence
Facing the trend of advanced processes, HUALIN KENA is continuously iterating CDS/SDS technology and developing a new generation of ultra‑pure, ultra‑precision, and modular dispensing systems to further enhance intelligence and integration. In the future, HUALIN KENA will continue to deepen its presence in the wet process field, take CDS/SDS equipment as the core, link cleaning and etching systems, and build a full‑process domestic solution to help China’s semiconductor industry achieve the leap from "equipment independence" to "technology leadership".
Conclusion
Amid the wave of domestic substitution in the semiconductor industry, HUALIN KENA will always stay true to its original aspiration, empower the industry with technological innovation, safeguard manufacturing with high‑quality equipment, and join hands with industry partners to draw a grand blueprint for the high‑quality development of China’s semiconductor industry.
