Cleaning parts:    wafers/other devices

Type:    Single cavity/double cavity/desktop dryer

Cleaning parts gauge: 4/5/6 /8inch wafers or devices

Working speed:    300-2400r/min

Piping system :   OneChamber modular

Exhaust system:    Indirect exhaust design, effectively stabilize air turbulence, while reducing odor.

Machine foot: with high and low adjustment and locking function

Machine positive pressure protection: N2 positive pressure protection

Machine dust control amount:   <80AddedAt0.2MicronorBetter

Nitrogen control unit:

1) Pipe valve :SMC solenoid valve, PFA high purity pipe, PTFE pneumatic valve

2) Nitrogen heating function: stainless steel heater online heating

3) Low pressure nitrogen function: when standby, maintain the positive pressure in the chamber to prevent pollution

DIW control unit:

1) Use swirl wash nozzle

2) Install the resistivity probe at the drain port to monitor the water quality of the cavity drainage

3) After the washing process is completed, nitrogen will blow the deionized water remaining in the washing pipe

4) When standby, keep water flowing into the return water box and the flow rate is adjustable.

Electronic Control Unit and Software Department:

1) Controller interface :5.7 "memory man-machine +PLC programmable automation controller (man-machine TouchScreen)

2) Software functions: Edit/save: process/repair/alert/edit/recipe/can be modified from the operation screen

3) Storage capacity: memory module: parameter memory, formula setting

Marangoni IPA dryer

If you want to know more about our products, please click contact us ！

E-mail: XU@hlkncse.com

WhatsApp: +86 17372890313